Methods for introduction of a reactive material into a vacuum chamber
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United States of America Patent
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Apr 1, 2014
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app pub date -
Oct 26, 2011
filing date -
Oct 31, 2008
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Abstract
A vacuum chamber assembly includes a vacuum chamber containing a reactive material, an inlet fill tube fixedly attached to the vacuum chamber, and an outlet fill tube fixedly attached to the vacuum chamber. The inlet fill tube has a first vacuum tight seal and the outlet fill tube has a second vacuum tight seal.
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