System and method for separating a main pulse and a pre-pulse beam from a laser source

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United States of America Patent

PATENT NO 8681427
APP PUB NO 20130321926A1
SERIAL NO

13535148

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Abstract

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A dichroic beam splitter module is disclosed for separating a main pulse laser beam from a pre-pulse laser beam each traversing a common beam path. In one embodiment, two dichroic elements are physically aligned along the beam path and are configured to pass the pre-pulse, a laser light having a first wavelength, to target material located near an irradiation site yet reflect the main pulse, a laser light having a second wavelength. The reflected main pulse is then further reflected by two reflective elements or mirrors from the first dichroic element to the second dichroic element and then on to the irradiation site. In alternative embodiments, the first mirror is deformable to alter beam characteristics of the reflected main pulse beam and the second mirror is adjustable to align the main pulse beam to the irradiation site.

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Patent Owner(s)

Patent OwnerAddress
TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING SEJOHANN-MAUS-STRASSE 2 71254 DITZINGEN 71254

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arcand, Jason Michael San Diego, US 3 37
Bergstedt, Robert A Carlsbad, US 23 548
Pate, Christopher Paul San Diego, US 2 35

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  • 15 Citation Count
  • G02B Class
  • 63.25 % this patent is cited more than
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