System and method for separating a main pulse and a pre-pulse beam from a laser source
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United States of America Patent
Stats
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Mar 25, 2014
Grant Date -
Dec 5, 2013
app pub date -
Jun 27, 2012
filing date -
May 31, 2012
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A dichroic beam splitter module is disclosed for separating a main pulse laser beam from a pre-pulse laser beam each traversing a common beam path. In one embodiment, two dichroic elements are physically aligned along the beam path and are configured to pass the pre-pulse, a laser light having a first wavelength, to target material located near an irradiation site yet reflect the main pulse, a laser light having a second wavelength. The reflected main pulse is then further reflected by two reflective elements or mirrors from the first dichroic element to the second dichroic element and then on to the irradiation site. In alternative embodiments, the first mirror is deformable to alter beam characteristics of the reflected main pulse beam and the second mirror is adjustable to align the main pulse beam to the irradiation site.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING SE | JOHANN-MAUS-STRASSE 2 71254 DITZINGEN 71254 |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Arcand, Jason Michael | San Diego, US | 3 | 37 |
# of filed Patents : 3 Total Citations : 37 | |||
Bergstedt, Robert A | Carlsbad, US | 23 | 548 |
# of filed Patents : 23 Total Citations : 548 | |||
Pate, Christopher Paul | San Diego, US | 2 | 35 |
# of filed Patents : 2 Total Citations : 35 |
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Patent Citation Ranking
- 15 Citation Count
- G02B Class
- 63.25 % this patent is cited more than
- 11 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Sep 25, 2025 |
Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

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Jul 11, 2012 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:BERGSTEDT, ROBERT A.;PATE, CHRISTOPHER PAUL;ARCAND, JASON MICHAEL;SIGNING DATES FROM 20120706 TO 20120709;REEL/FRAME:028532/0392 Owner name: CYMER, INC., CALIFORNIA |
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