Sample inspection methods, systems and components

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United States of America Patent

PATENT NO 8669525
APP PUB NO 20110121176A1
SERIAL NO

12997686

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Abstract

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The disclosure relates to sample inspection using an ion-beam microscope. In some embodiments, the disclosure involves the use of multiple detectors, each of which provides different information about a sample.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS MICROSCOPY LLCONE ZEISS DRIVE THORNWOOD NY 10594

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Notte,, IV John Gloucester, US 7 17
Sijbrandij, Sybren Wakefield, US 4 2
Thompson, William B Los Altos, US 18 414

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