Coating device and nozzle managing method
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United States of America Patent
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Mar 11, 2014
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app pub date -
Jun 25, 2010
filing date -
Jul 6, 2009
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Abstract
A coating device including a coating mechanism which includes nozzles for ejecting a liquid material onto front and rear surfaces of the substrate while rotating a substrate in an upright state, and a nozzle managing mechanism which manages the state of the nozzles, in which the nozzle managing mechanism includes a soaking portion which dips the front end of the nozzle in a soak solution, and a discharging portion which discharges at least the soak solution, and a nozzle managing method.
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