Device and method of supplying power to an electron source, and ion-bombardment-induced secondary-emission electron source
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United States of America Patent
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Mar 4, 2014
Grant Date -
Mar 10, 2011
app pub date -
Jan 8, 2009
filing date -
Jan 11, 2008
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Abstract
The power supply device (14) for an ion-bombardment-induced secondary-emission electron source in a low-pressure chamber includes a control input, two high-voltage outputs, an element for generating a plurality of positive pulses on a high-voltage output, and an element for generating a negative pulse on the other high-voltage output after at least some of the positive pulses.
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