Thin-film layer structure and method for manufacturing same
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United States of America Patent
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Mar 4, 2014
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app pub date -
Jul 23, 2007
filing date -
Oct 11, 2006
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Abstract
A thin-film layer structure (100) includes a substrate (102), a plurality of banks (104) with a roughly same height formed on the substrate, and a plurality of thin-film layers (106). The plurality of banks defines a plurality of spaces therein, and the plurality of spaces is arranged in rows and columns. A volume distribution of the plurality of spaces receiving the thin-film layers made of a same material in each row is irregular. A method for manufacturing a thin-film layer structure is also provided.
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