Wire holder and terminal connector for hot wire chemical vapor deposition chamber
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United States of America Patent
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Mar 4, 2014
Grant Date -
Nov 15, 2012
app pub date -
Apr 24, 2012
filing date -
May 12, 2011
priority date (Note) -
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Abstract
Apparatus for supporting the wires in a hot wire chemical vapor deposition (HWCVD) system are provided herein. In some embodiments, a terminal connector for a hot wire chemical vapor deposition (HWCVD) system may include a base; a wire clamp moveably disposed with relation to the base along an axis; a reflector shield extending from the wire clamp in a first direction along the axis; and a tensioner coupled to the base and wire clamp to bias the wire clamp in a second direction opposite the first direction.
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