Microelectromechanical gyroscopes and related apparatus and methods
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United States of America Patent
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Mar 4, 2014
Grant Date -
Feb 2, 2012
app pub date -
Mar 1, 2011
filing date -
Mar 1, 2010
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Abstract
An apparatus is described that includes a substrate having a first plate and a second plate. The first plate and the second plate collectively have a first mode when excited by a drive signal and have a second mode when excited by a gyroscopic effect. The first and second plates each include a temperature-compensated stack having first and third layers that have a stiffness that increases with increasing temperature over a temperature range with a second layer between the first and third layers, where the second layer is formed from a different material than the first and third layers.
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