Method and apparatus for processing metal bearing gases
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
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Feb 25, 2014
Issued Date -
N/A
app pub date -
Dec 23, 2011
filing date -
Dec 23, 2011
priority date (Note) -
Withdrawn
status (Latency Note)
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Abstract
A method and apparatus for processing metal bearing gases involves generating a toroidal plasma in a plasma chamber. A metal bearing gas is introduced into the plasma chamber to react with the toroidal plasma. The interaction between the toroidal plasma and the metal bearing gas produces at least one of a metallic material, a metal oxide material or a metal nitride material.
First Claim
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Family
Country | kind | publication No. | Filing Date | Type | Sub-Type |
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
- MKS INSTRUMENTS, INC.
International Classification(s)

- 2011 Application Filing Year
- B23K Class
- 1280 Applications Filed
- 968 Patents Issued To-Date
- 75.63 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Chen, Xing | Lexington, US | 193 | 4664 |
# of filed Patents : 193 Total Citations : 4664 | |||
Holber, William M | Winchester, US | 44 | 2976 |
# of filed Patents : 44 Total Citations : 2976 | |||
Smith, Donald K | Belmont, US | 68 | 2674 |
# of filed Patents : 68 Total Citations : 2674 | |||
Smith, John A | North Andover, US | 43 | 911 |
# of filed Patents : 43 Total Citations : 911 |
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Patent Citation Ranking
- 0 Citation Count
- B23K Class
- 0 % this patent is cited more than
- 11 Age
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- No Forward Cites to Display

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Nov 17, 2016 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:ROGERS, JOHN A.;WILSON, WILLIAM L.;JIN, SUNG HUN;AND OTHERS;SIGNING DATES FROM 20140421 TO 20161116;REEL/FRAME:040645/0251 Owner name: THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOI free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:ROGERS, JOHN A.;WILSON, WILLIAM L.;JIN, SUNG HUN;AND OTHERS;SIGNING DATES FROM 20140421 TO 20161116;REEL/FRAME:040645/0251 Owner name: UNIVERSITY OF MIAMI, FLORIDA free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:ROGERS, JOHN A.;WILSON, WILLIAM L.;JIN, SUNG HUN;AND OTHERS;SIGNING DATES FROM 20140421 TO 20161116;REEL/FRAME:040645/0251 Owner name: NORTHWESTERN UNIVERSITY, ILLINOIS |
May 12, 2016 | P | Published | |
Apr 03, 2014 | F | Filing |

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