Method and apparatus for processing metal bearing gases

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United States of America

PATENT NO 8658936
SERIAL NO

13336616

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Abstract

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A method and apparatus for processing metal bearing gases involves generating a toroidal plasma in a plasma chamber. A metal bearing gas is introduced into the plasma chamber to react with the toroidal plasma. The interaction between the toroidal plasma and the metal bearing gas produces at least one of a metallic material, a metal oxide material or a metal nitride material.

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  • MKS INSTRUMENTS, INC.

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  • 2011 Application Filing Year
  • B23K Class
  • 1280 Applications Filed
  • 968 Patents Issued To-Date
  • 75.63 % Issued To-Date

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Xing Lexington, US 193 4664
Holber, William M Winchester, US 44 2976
Smith, Donald K Belmont, US 68 2674
Smith, John A North Andover, US 43 911

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges10765112951219611201 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 80100 +050100150200250300350400450500550600650700

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