Robotic device for substrate transfer applications
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United States of America Patent
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Feb 25, 2014
Grant Date -
Oct 11, 2012
app pub date -
Apr 11, 2011
filing date -
Apr 11, 2011
priority date (Note) -
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Abstract
A device for use in the semiconductor industry includes a robotic arm whose end effector includes at least two prongs designed to hold a substrate carrier. A pushing member located between the prongs can move independently of the prongs and is configured to exert force against the substrate carrier while the prongs are retracted from the substrate carrier, after the substrate carrier has been brought to its intended position. In this manner, the position of the substrate carrier is maintained at its intended position as the prongs are retracted. Each of the prongs may include a claw or gripping member for grasping the substrate carrier.
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