Incoherent cavity ringdown spectroscopy gas analyzer coupled with periodic chemical scrubbing

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United States of America Patent

PATENT NO 8654334
SERIAL NO

13347440

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Abstract

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An incoherent cavity ringdown spectroscopy (iCRDS) gas analyzer is provided with a gas flow path to introduce a sample gas into an enclosed volume bounded by a pair of mirrors defining an optical cavity. A pulsed broadband incoherent light source with a wavelength band that coincides with an absorption band of a specified gas species to be detected (e.g., NO2 or SO3) directs pulses of light into the optical cavity, while a photodetector is positioned to detect light exiting the cavity. A scrubber in an alternate flow path into the enclosed volume periodically scrubs the sample gas of the specified gas species. A processor determines the concentration of the specified gas species from the ringdown decay time of the photodetector measurement signals, with the periodic scrubbing of the sample gas providing a calibration reference from its slower decay time.

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Patent OwnerAddress
LOS GATOS RESEARCH67 EAST EVELYN AVENUE SUITE 3 MOUNTAIN VIEW CA 94041

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baer, Douglas Steven Menlo Park, US 2 15
Gupta, Manish Mountain View, US 341 7220
Leen, J Brian Sunnyvale, US 11 51

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