Apparatus, tool and methods for depositing annular or circular wedge coatings
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United States of America Patent
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Feb 11, 2014
Grant Date -
Dec 1, 2011
app pub date -
May 31, 2010
filing date -
May 31, 2010
priority date (Note) -
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Abstract
An apparatus for depositing annular or circular wedge coatings with arbitrary dependence of thickness versus position includes a coating tool in which at least one substrate is disposed in a line of sight arrangement vs. least one deposition source, each substrate having an axis of symmetry and associated with a single mask having an aperture and positioned between the substrate and the least one deposition source, the mask and the substrate arranged to perform a relative rotation around a common axis to follow a law of motion which results in the deposition of a coating with a desired law of variation of thickness vs. position on the circumference of the substrate. The relative rotation is imparted by a motor. In embodiments in which there are a plurality of substrates and associated single masks, the substrates are positioned on a planet carrier independently rotatable by another motor.
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