Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration
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United States of America Patent
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Feb 4, 2014
Grant Date -
Oct 25, 2012
app pub date -
Apr 25, 2012
filing date -
Nov 14, 2007
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Abstract
A method for large scale manufacture of photovoltaic devices includes loading a substrate into a load lock station and transferring the substrate in a controlled ambient to a first process station. The method includes using a first physical deposition process in the first process station to cause formation of a first conductor layer overlying the surface region of the substrate. The method includes transferring the substrate to a second process station, and using a second physical deposition process in the second process station to cause formation of a second layer overlying the surface region of the substrate. The method further includes repeating the transferring and processing until all thin film materials of the photovoltaic devices are formed. In an embodiment, the invention also provides a method for large scale manufacture of photovoltaic devices including feed forward control.
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