Polishing head and polishing apparatus

United States of America Patent

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Jan 28, 2014
Grant Date
Jun 9, 2011
app pub date
Aug 7, 2009
filing date
Aug 29, 2008

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Abstract

A polishing head for holding a workpiece when a surface of the workpiece is polished and a polishing apparatus provided with the polishing head, and more particularly a polishing head for holding the workpiece on a rubber film and a polishing apparatus provided with the polishing head. The polishing head and the polishing apparatus provided with the polishing head that can adjust the polishing profile on the basis of the shape of the workpiece before polishing and can stably obtain good flatness.

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Patent Owner(s)

Patent Owner	Address
SHIN-ETSU HANDOTAI CO LTD	TOKYO 100-0004
FUJIKOSHI MACHINERY CORP	1650 KIYONO MATSUSHIRO-MACHI NAGANO-SHI NAGANO 381-1233

International Classification(s)

2009 Application Filing Year
B24B Class
470 Applications Filed
337 Patents Issued To-Date
71.71 % Issued To-Date

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Arakawa, Satoru	Nagano, JP	11	56
# of filed Patents : 11 Total Citations : 56
Hashimoto, Hiromasa	Nishishirakawa, JP	64	984
# of filed Patents : 64 Total Citations : 984
Kishida, Hiromi	Nagano, JP	11	28
# of filed Patents : 11 Total Citations : 28
Masumura, Hisashi	Nishishirakawa, JP	44	582
# of filed Patents : 44 Total Citations : 582
Morita, Kouji	Nishishirakawa, JP	40	262
# of filed Patents : 40 Total Citations : 262

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B24B Class

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Fee	Large entity fee	small entity fee	micro entity fee	due date
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Jul 28, 2025

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Polishing head and polishing apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

13056249

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PATENT NO	8636561
APP PUB NO	20110136414A1
SERIAL NO	13056249
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
January 28, 2014	US,8636561,B2 US8636561B2	GRANTED PATENT AS SECOND PUBLICATION
June 09, 2011	US,20110136414,A1 US20110136414A1	FIRST PUBLISHED PATENT APPLICATION

Date	Code	Event	Description
Aug 28, 2024	MAFP	MAINTENANCE FEE PAYMENT	free format text: PAYMENT OF MAINTENANCE FEE, 8TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1552); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY year of fee payment: 8
Sep 03, 2020	MAFP	MAINTENANCE FEE PAYMENT	free format text: PAYMENT OF MAINTENANCE FEE, 4TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1551); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY year of fee payment: 4
Mar 14, 2017	I	Issuance
Feb 22, 2017	STCF	INFORMATION ON STATUS: PATENT GRANT	free format text: PATENTED CASE
Mar 18, 2015	AS	ASSIGNMENT	free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:THE PILOT INK CO., LTD.;REEL/FRAME:035360/0152 Owner name: KABUSHIKI KAISHA PILOT CORPORATION (ALSO TRADING A Effective Date: Mar 18, 2015 free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:THE PILOT INK CO., LTD.;REEL/FRAME:035360/0152 Owner name: THE PILOT INK CO., LTD., JAPAN Effective Date: Mar 18, 2015
Nov 27, 2008	P	Published
May 21, 2008	F	Filing
May 13, 2008	AS	ASSIGNMENT	free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:WASE, TAKASHI;YASUDA, MICHIYUKI;OKAWARA, YOSHIAKI;REEL/FRAME:020975/0663 Owner name: THE PILOT INK CO., LTD., JAPAN Effective Date: May 13, 2008
May 22, 2007	PD	Priority Date

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13056249

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