Scratch protection for direct contact sensors
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United States of America Patent
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Jan 21, 2014
Grant Date -
Apr 19, 2012
app pub date -
Sep 14, 2011
filing date -
Jul 26, 1999
priority date (Note) -
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Abstract
In capacitive sensor circuits where physical contact is required and excess pressure may be inadvertently applied to the sensor surface, aluminum is not sufficiently hard to provide “scratch” protection and may delaminate, causing circuit failure, even if passivation integrity remains intact. Because hard passivation layers alone provide insufficient scratch resistance, at least the capacitive electrodes and preferably all metallization levels within the sensor circuit in the region of the capacitive electrodes between the surface and the active regions of the substrate are formed of a conductive material having a hardness greater than that of aluminum, and at least as great as the lowest hardness for any interlevel dielectric or passivation material employed.
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