Solar cell made in a single processing chamber

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United States of America Patent

PATENT NO 8628999
APP PUB NO 20130224900A1
SERIAL NO

13406838

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Abstract

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Methods for forming a photovoltaic device include depositing a p-type layer on a substrate and cleaning the p-type layer by exposing a surface of the p-type layer to a plasma treatment to react with contaminants. An intrinsic layer is formed on the p-type layer, and an n-type layer is formed on the intrinsic layer.

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Patent Owner(s)

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GLOBALFOUNDRIES U S INC2600 GREAT AMERICA WAY SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hong, Augustin J White Plains, US 63 1079
Hopstaken, Marinus J Carmel, US 10 40
Huang, Chien-Chih Pingtung, TW 47 210
Huang, Yu-Wei Tainan, TW 42 221
Kim, Jeehwan Los Angeles, US 249 1355
Sadana, Devendra K Pleasantville, US 897 10959
Tseng, Chih-Fu Tainan, TW 4 10

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