CMP pad dressers with hybridized abrasive surface and related methods
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United States of America Patent
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Jan 7, 2014
Grant Date -
Sep 30, 2010
app pub date -
Mar 18, 2010
filing date -
Nov 16, 2006
priority date (Note) -
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Abstract
The present invention provides CMP pad dressers and methods for dressing or conditioning CMP pads. In one aspect, a method for conditioning a CMP pad can include cutting the CMP pad with superabrasive cutting elements and controlling a degree of contact between the CMP pad and the cutting elements using control elements. The degree of contact is established through placement of the control elements relative to the cutting elements.
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