CMOS structures and processes based on selective thinning

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8614128
SERIAL NO

13591767

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Methods for fabricating semiconductor devices and devices therefrom are provided. A method includes providing a substrate having a semiconducting surface with first and second layers, where the semiconducting surface has a plurality of active regions comprising first and second active regions. In the first active region, the first layer is an undoped layer and the second layer is a highly doped screening layer. The method also includes removing a part of the first layer to reduce a thickness of the substantially undoped layer for at least a portion of the first active region without a corresponding thickness reduction of the first layer in the second active region. The method additionally includes forming semiconductor devices in the plurality of active regions. In the method, the part of the first layer removed is selected based on a threshold voltage adjustment required for the substrate in the portion of the first active region.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
MIE FUJITSU SEMICONDUCTOR LIMITED2000 MIZONO TADO-CHO KUWANA MIE 511-0118

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Duane, Michael San Carlos, US 37 304
Gregory, Paul E Palo Alto, US 22 259
Hoffmann, Thomas Los Gatos, US 144 1468
Ranade, Pushkar Los Gatos, US 126 1886
Scudder, Lance Sunnyvale, US 29 778
Sridharan, U C San Jose, US 5 10
Thompson, Scott E Gainesville, US 64 1047
Zhao, Dalong San Jose, US 27 584

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
11.5 Year Payment $7400.00 $3700.00 $1850.00 Jun 24, 2025
Fee Large entity fee small entity fee micro entity fee
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00