Plasma confinement apparatus, and method for confining a plasma
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Dec 17, 2013
Grant Date -
Apr 19, 2007
app pub date -
Oct 10, 2006
filing date -
Oct 14, 2005
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A plasma confinement apparatus, and method for confining a plasma are described and which includes, in one form of the invention, a plurality of electrically insulated components which are disposed in predetermined spaced relation, one relative to the others, and surrounding a processing region of a plasma processing apparatus, and wherein a plurality of passageways are defined between the respective insulated components; and at least one electrically conductive and grounded component forms an electrical field shielding for the processing region.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
ADVANCED MICRO-FABRICATION EQUIPMENT INC CHINA | 188 TAIHUA ROAD JINQIAO EXPORT PROCESSING ZONE (SOUTH AREA) PUDONG SHANGHAI 201201 |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Chen, Jinyuan | Union City, US | 17 | 282 |
# of filed Patents : 17 Total Citations : 282 | |||
Fu, Yuehong | Fremont, US | 10 | 115 |
# of filed Patents : 10 Total Citations : 115 | |||
Ni, Tom | Pleasanton, US | 6 | 246 |
# of filed Patents : 6 Total Citations : 246 | |||
Qian, Qing | San Jose, US | 11 | 48 |
# of filed Patents : 11 Total Citations : 48 | |||
Wang, Ye | Shanghai, CN | 193 | 1582 |
# of filed Patents : 193 Total Citations : 1582 | |||
Xu, Zhaoyang | Shanghai, CN | 20 | 549 |
# of filed Patents : 20 Total Citations : 549 | |||
Zhou, Xusheng | Shanghai, CN | 4 | 8 |
# of filed Patents : 4 Total Citations : 8 |
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Patent Citation Ranking
- 3 Citation Count
- C23C Class
- 7.13 % this patent is cited more than
- 12 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jun 17, 2025 |
Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

Legal Events
Date | Code | Event | Description |
---|---|---|---|
Jan 23, 2018 | STCH | INFORMATION ON STATUS: PATENT DISCONTINUATION | free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
Mar 24, 2003 | LAPS | LAPSE FOR FAILURE TO PAY MAINTENANCE FEES | |
Mar 23, 2003 | FP | LAPSED DUE TO FAILURE TO PAY MAINTENANCE FEE | Effective Date: Mar 23, 2003 |
Oct 09, 2002 | REMI | MAINTENANCE FEE REMINDER MAILED | |
Aug 21, 2001 | CC | CERTIFICATE OF CORRECTION | |
Mar 23, 1999 | I | Issuance | |
Jul 18, 1997 | F | Filing | |
Jul 18, 1997 | PD | Priority Date | |
Jul 08, 1997 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:PUCILLO, BARRY;REEL/FRAME:008685/0335 Owner name: AMERICAN LOUVER COMPANY, ILLINOIS Effective Date: Jul 08, 1997 |

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