Method of fabricating thin film transistor having amorphous and polycrystalline silicon

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United States of America Patent

PATENT NO 8603869
APP PUB NO 20100244038A1
SERIAL NO

12743889

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Abstract

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Provided are thin film transistor, a method of fabricating the same, a flat panel display device including the same, and a method of fabricating the flat panel display device, that are capable of applying an electric field to a gate line to form a channel region of a semiconductor layer of a thin film transistor using a polysilicon layer crystallized by a high temperature heat generated by Joule heating of a conductive layer. As a result, a process can be simplified using a gate line included in the thin film transistor as the conductive layer, and the channel region of the semiconductor layer can be formed of polysilicon having a uniform degree of crystallinity. The thin film transistor includes a straight gate line disposed in one direction, a semiconductor layer crossing the gate line, and source and drain electrodes connected to source and drain regions of the semiconductor layer.

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Patent Owner(s)

Patent OwnerAddress
DAWONSYS CO LTD(SEONGGOK-DONG) 485 SIHWAHOSU-RO DANWON-GU ANSAN-SI GYEONGGI-DO 15655

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hong, Won-Eui Seoul, KR 27 152
Ro, Jae-Sang Seoul, KR 28 162

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