Lift pin driving device and manufacturing apparatus having same
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United States of America Patent
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-
Dec 10, 2013
Grant Date -
Jun 12, 2008
app pub date -
Oct 18, 2007
filing date -
Dec 11, 2006
priority date (Note) -
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Abstract
A lift pin driving device and a manufacturing apparatus having the device are provided. The device includes drive unit including a single drive motor that drives a pin plate, a plurality of timing belts and a plurality of pulleys. The pin plate, which supports a plurality of lift pins thereon, is moved by the pulleys, operated in conjunction with the motor through the timing belts. A tensioner controls a tension of the timing belts. The tensioner may be controlled to provide precise rectilinear movement without leaning, and to prevent the timing belts from sagging. The device efficiently controls the tension of the timing belts and allows the lift pins to be precisely moved upwards or downwards such that a substrate positioned thereon may maintain a horizontal position while being moved upwards or downwards.
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