Method and apparatus for adjusting radiation spot size
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United States of America Patent
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Dec 3, 2013
Grant Date -
Jun 27, 2013
app pub date -
Dec 23, 2011
filing date -
Dec 23, 2011
priority date (Note) -
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Abstract
An apparatus can include a first beam cropper configured to crop a portion of a radiation pulse having a first spot size to form an intermediate cropped radiation pulse having an intermediate cropped spot with an intermediate cropped spot size less than the first spot size; and a second beam cropper configured to crop the intermediate cropped spot to form a second cropped radiation pulse having a second cropped spot with a second cropped spot size less the intermediate cropped spot size.
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