Lithium extreme ultraviolet source and operating method
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United States of America Patent
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Nov 26, 2013
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app pub date -
Feb 25, 2013
filing date -
Feb 25, 2013
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Abstract
A plasma pinch extreme ultraviolet source using lithium vapor requires surrounding surfaces that are heated or cooled in order to evaporate the desired quantity of lithium, typically setting the vapor pressure of lithium at a pressure of a few torr. Two distinct surfaces within the whole set are designated as the electrodes that emit and receive the high current of the plasma pinch. A method is described whereby the temperature of these designated electrode surfaces is manipulated in order to condense lithium and provide a liquid metal protective layer to absorb both plasma and extreme ultraviolet heat thereby controlling electrode erosion. A further method is described that provides a protective flow of liquid lithium exactly on the axis of the pair of discharge electrodes.
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