Mounting table structure and plasma film forming apparatus
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United States of America Patent
Stats
-
Nov 26, 2013
Grant Date -
Sep 30, 2010
app pub date -
Mar 17, 2010
filing date -
Mar 17, 2009
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A mounting table structure for mounting thereon an object to be processed to form a metal-containing thin film on the object includes a ceramic mounting table in which a chuck electrode and a heater are embedded, and a metal flange connected to a bottom surface of a peripheral portion of the mounting table. The mounting table structure further includes a metal base which is joined to the flange by screws and has a coolant path for flowing a coolant therein, and a metal seal member interposed between the flange and the base.
First Claim
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International Classification(s)
Cited Art Landscape
Patent Citation Ranking
- 4 Citation Count
- B23K Class
- 8.56 % this patent is cited more than
- 12 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | May 26, 2025 |
