Method of bonding semiconductor substrate and MEMS device
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United States of America Patent
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Nov 26, 2013
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app pub date -
Dec 11, 2009
filing date -
Dec 11, 2009
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Abstract
A method of bonding a semiconductor substrate has a step of pressurizing and heating to bond a substrate 11 with a substrate 12 by eutectic bonding in a state that an aluminum containing layer 31 and a germanium layer 32 between a bonding section 30a of the substrate 11 and a bonding section 30b of the substrate 21 are overlaid and an outer end 32a of the germanium layer 32 is receded inward with respect to an outer end 31a of the aluminum containing layer 31.
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