Fabrication method and fabrication apparatus for fabricating metal oxide thin film
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United States of America Patent
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Nov 26, 2013
Grant Date -
Jul 1, 2010
app pub date -
May 16, 2008
filing date -
May 22, 2007
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Abstract
A fabrication method for fabricating a metal oxide film introduces H2 gas and O2 gas or, H2O2 gas, into a catalytic reactor to make contact with a catalyst to generate H2O gas. The H2O gas that is generated is jetted from the catalytic reactor to react with a metal compound gas, to thereby deposit the metal oxide thin film on a substrate and fabricate the metal oxide thin film.
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