Machine having an air bearing and method for operating such a machine

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United States of America Patent

PATENT NO 8590875
APP PUB NO 20130181387A1
SERIAL NO

13552852

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A machine has a frame structure for moving a machine head in one or more spatial directions. The frame structure comprises an actuator and an air bearing for moving the head. The machine also comprises a compressed air feed connected to the air bearing for providing a compressed air flow. A restrictor defines the compressed air flow to the air bearing. The machine has a first operating state, in which a high compressed air flow is defined and in which the actuator can be actuated. The machine has a second operating state, in which a compressed air flow lower than the high compressed air flow is defined. In the second operating state, the actuator is secured against actuation from a closed-loop position controller, while the closed-loop position controller is maintained in operation.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBHCARL-ZEISS-STRASSE 22 OBERKOCHEN 73447

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Stumpp, Ernst Koenigsbronn, DE 5 19

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