Cylinder surface treated container for monochlorosilane
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United States of America Patent
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Nov 26, 2013
Grant Date -
May 3, 2012
app pub date -
Apr 20, 2011
filing date -
Jun 11, 2010
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Abstract
The present invention is a container and a processing for passivating the internal surface of the container to store monochlorosilane in a stable manner without degradation of the monochlorosilane. Various container surface modifications have been identified to reduce surface reactions to acceptable levels. Some of the described surface modifications result in significant reduction in monochlorosilane instability.
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