On-machine measurement method and measurement apparatus
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United States of America Patent
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Nov 19, 2013
Grant Date -
Jan 20, 2011
app pub date -
May 12, 2010
filing date -
Jul 17, 2009
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Abstract
A reference mirror 21 is disposed on a table 2, a first laser displacement sensor L1 for measuring a machined surface of a workpiece W and a second laser displacement sensor L2 for measuring a reference surface of the reference mirror 21 are disposed to a tool holder 3. A measurement motion applying section 24 causes the table 2 and the tool holder 3 to relatively move in a sinusoidal trajectory, and a sensitivity calculating section 28 calculates sensitivity of the first laser displacement sensor L1 based on machined-surface displacement data and reference-surface displacement data which are measured during the relative movement. Subsequently, an actual shape data calculating section 29 corrects the machined-surface displacement data based on the calculated sensitivity, and calculates actual shape data of the machined surface by taking the difference between the corrected machined-surface displacement data and the reference-surface displacement data.
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