Removable transparent membrane for a pellicle
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United States of America Patent
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Nov 19, 2013
Grant Date -
Mar 14, 2013
app pub date -
Sep 12, 2011
filing date -
Sep 12, 2011
priority date (Note) -
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Abstract
According to one embodiment, a pellicle includes first and second frame members that are selectively removable from one another. The second frame member has an annular shape similar to and is physically coupled to an outer periphery of a transparent membrane. The second frame member configured to be selectively coupled to the first frame member from a engaged position adjacent to the first frame member to a disengaged position in which the second frame member is separated from the first frame member.
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