Method and apparatus for producing small structures

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8586142
APP PUB NO 20090269558A1
SERIAL NO

12441680

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Abstract

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The present invention relates to a method for producing small structures includes: depositing a mask on a surface of a substrate; and evaporating a source material under such evaporation condition performed at such pressure to form a layer onto both a shadowed surface area and a non-shadowed surface area of the mask and the substrate.

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Patent Owner(s)

Patent OwnerAddress
FUJIREBIO INCSHINJUKU SHINJUKU JAPAN TOKYO TWO 1 1 TOKYO TOKYO METROPOLIS

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Himmelhaus, Michael Tokyo, JP 16 199
Whitehouse, Conor D Tokyo, JP 1 11
Worsfold, Oliver Tokyo, JP 1 11

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