Nano-resonator inertial sensor assembly
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United States of America Patent
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Nov 19, 2013
Grant Date -
Jan 24, 2013
app pub date -
Dec 13, 2011
filing date -
Oct 21, 2008
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Abstract
The invention is a frequency modulated (FM) inertial sensing device and method which, in one embodiment, comprises an accelerometer having a proof mass coupled to a nano-resonator element. The nano-resonator element is oscillated at a first predetermined frequency, which may be a first resonant frequency, and is altered to oscillate at a second frequency, which may be a second resonant frequency, in response to a resultant force produced by the acceleration of the proof mass. The degree of change in nano-resonator element output frequency is sensed and processed using suitable processing circuitry as a change in acceleration.
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