Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
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United States of America Patent
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Nov 12, 2013
Grant Date -
Jun 28, 2012
app pub date -
Mar 5, 2012
filing date -
Jan 5, 2005
priority date (Note) -
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Abstract
A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.
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