Functional device array with self-aligned electrode structures and fabrication methods thereof
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United States of America Patent
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Nov 12, 2013
Grant Date -
Dec 10, 2009
app pub date -
Nov 20, 2008
filing date -
Jun 10, 2008
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Abstract
A functional device array with self-aligned electrode structures and fabrication methods thereof are presented. The functional device array includes a transparent substrate. A patterned lower electrode array is disposed on the transparent substrate. A spacer structure is disposed overlying the transparent substrate and located between the patterned lower electrodes self-aligned therewith. A functional structure layer is disposed in an array of pixel regions defined by the spacer structure. A patterned upper substrate is disposed on the functional structure layer corresponding to each of the pixel regions, and a passivation layer is disposed on the patterned upper electrode covering the functional device array.
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