Method for inspecting electrostatic chuck, and electrostatic chuck apparatus
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United States of America Patent
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Nov 12, 2013
Grant Date -
Aug 18, 2011
app pub date -
Oct 19, 2009
filing date -
Oct 20, 2008
priority date (Note) -
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Abstract
Provided are a method and an apparatus capable of determining which attracting electrode in an electrostatic chuck of bipolar type has a capacitance abnormality occurring in its vicinity. In this inspection method, a positive auxiliary electrode (12) and a negative auxiliary electrode (14) are provided in a dielectric body (6) of an electrostatic chuck (4), and are connected to a ground potential portion. Then, transient currents (I1 to I4) flowing through the attracting electrodes (8 and 10) and the auxiliary electrodes (12 and 14) are measured when direct current voltages (+V and −V) are applied or cease to be applied from a chuck power supply (26) to the electrostatic chuck (4) under a state in which an object (2) to be attracted is not mounted, and a transient current (I5) (=I1−I2 or I3−I4) is calculated. The obtained transient currents are compared to respective predetermined reference values, to thereby determine a capacitance abnormality in the electrostatic chuck (4).
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