Thin film transistor (TFT) having copper electrodes

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United States of America Patent

PATENT NO 8581248
APP PUB NO 20120146018A1
SERIAL NO

13390388

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Abstract

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A TFT structure is provided in which an oxidic semiconductor is used in combination with an electrode material based on a Cu alloy.

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Patent Owner(s)

Patent OwnerAddress
HERAEUS DEUTSCHLAND GMBH & CO KGHERAEUSSTRASSE 12 - 14 HANAU 63450

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Schlott, Martin Offenbach, DE 26 97
Schneider-Betz, Sabine Dreieich, DE 3 11

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