Planar magnetic field probe
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United States of America Patent
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Nov 5, 2013
Grant Date -
Jul 26, 2012
app pub date -
May 26, 2011
filing date -
Jan 20, 2011
priority date (Note) -
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Abstract
A planar magnetic field probe is provided. The planar magnetic field probe increases the sensitivity of magnetic field intensity detection by using a left multi-sensor loop and a right multi-sensor loop formed by a first patterned metal layer and a second patterned metal layer, and decreases the electric field noise coupling by surrounding the left multi-sensor loop and the right multi-sensor loop with a symmetrical shielding metal structure formed by a first patterned shielding metal layer, a second patterned shielding metal layer and a plurality of through vias.
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