System, method and apparatus for laser produced plasma extreme ultraviolet chamber with hot walls and cold collector mirror

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United States of America Patent

PATENT NO 8575575
APP PUB NO 20100258749A1
SERIAL NO

12725167

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Abstract

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A system and method for an extreme ultraviolet light chamber comprising a collector mirror, a cooling system coupled to a backside of the collector mirror operative to cool a reflective surface of the collector mirror and a buffer gas source coupled to the extreme ultraviolet light chamber.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 22102

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fomenkov, Igor V San Diego, US 156 5670
Partlo, William N Poway, US 183 6942

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