Induction heated buffer gas heat pipe for use in an extreme ultraviolet source
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United States of America Patent
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Oct 29, 2013
Grant Date -
Jun 20, 2013
app pub date -
Dec 14, 2011
filing date -
Dec 14, 2011
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Abstract
The successful use of lithium vapor in an extreme ultraviolet (EUV) light source depends upon an intense localized heat source at the center of conical structures that evaporate, condense and re-supply liquid lithium. Induction heating of a hollow structure with toroidal topology via an internal helical field coil, can supply intense heat at its innermost radius. The resulting slim radio frequency heated structure has high optical transmission from a central EUV producing plasma to collection mirrors outside of the structure, improving EUV source efficiency and reliability.
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