Integrated circuit switches, design structure and methods of fabricating the same
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United States of America Patent
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Oct 29, 2013
Grant Date -
Mar 3, 2011
app pub date -
Aug 27, 2009
filing date -
Aug 27, 2009
priority date (Note) -
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Abstract
Integrated MEMS switches, design structures and methods of fabricating such switches are provided. The method includes forming at least one tab of sacrificial material on a side of a switching device which is embedded in the sacrificial material. The method further includes stripping the sacrificial material through at least one opening formed on the at least one tab which is on the side of the switching device, and sealing the at least one opening with a capping material.
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