Agent for detoxifying discharge gas containing volatile inorganic hydride and method of detoxifying discharge gas containing volatile inorganic hydride
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United States of America Patent
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Oct 29, 2013
Grant Date -
May 3, 2012
app pub date -
Mar 27, 2009
filing date -
Mar 27, 2009
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Abstract
A detoxifying agent and a detoxifying method are provided which have a high detoxifying ability in a detoxifying treatment of a discharge gas containing a volatile inorganic hydride and generating in a semiconductor production step. A zeolite is added to a solid metal hydroxide, a solid metal carbonate, a solid basic metal carbonate, or a mixture of these compounds to thereby obtain the detoxifying agent which has the excellent ability to detoxify a discharge gas containing volatile inorganic hydride. The zeolite to be added is a synthetic zeolite selected from zeolite Y, MFI zeolite, mordenite zeolite, beta zeolite, zeolite A, zeolite X, and zeolite L or is a natural zeolite.
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