Optical semiconductor device, laser chip and laser module
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United States of America Patent
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Oct 22, 2013
Grant Date -
Apr 26, 2012
app pub date -
Dec 28, 2011
filing date -
Mar 30, 2006
priority date (Note) -
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Abstract
An optical semiconductor device has a semiconductor substrate, an optical semiconductor region and a heater. The optical semiconductor region is provided on the semiconductor substrate and has a width smaller than that of the semiconductor substrate. The heater is provided on the optical semiconductor region. The optical semiconductor region has a cladding region, an optical waveguide layer and a low thermal conductivity layer. The optical waveguide layer is provided in the cladding region and has a refractive index higher than that of the cladding region. The low thermal conductivity layer is provided between the optical waveguide layer and the semiconductor substrate and has a thermal conductivity lower than that of the cladding region.
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