Thin film support substrate for use in hydrogen production filter and production method of hydrogen production filter
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United States of America Patent
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Oct 22, 2013
Grant Date -
Dec 29, 2011
app pub date -
Sep 9, 2011
filing date -
Jul 25, 2002
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Abstract
In a through hole closing process, a metal plate is attached to one surface of a conductive base member having a plurality of through holes by the use of a magnet, in a copper plating process, a copper plating layer is formed on the conductive base member and the metal plate exposed within the through holes, from the side of the conductive base member where the metal plate is not attached, thereby to fill up the through holes, in a film forming process, a Pd alloy film is formed by plating on the surface of the conductive base member after removal of the metal plate, and in a removal process, the copper plating layer is removed by selective etching, thereby to produce a hydrogen production filter that is used in a reformer a fuel cell so as to be capable of stably producing high purity hydrogen gas.
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