Apparatus and method for measuring displacement, method of making die for molding optical element, and optical element
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United States of America Patent
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Oct 15, 2013
Grant Date -
Jul 12, 2012
app pub date -
Jan 5, 2012
filing date -
Jan 12, 2011
priority date (Note) -
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Abstract
A beam splitter splits a laser beam emitted from a laser light source into a first laser beam that travels toward an object and a second laser beam. The second laser beam is received by a second photodetector. The second photodetector is positioned such that the light quantity of the second laser beam incident on the second photodetector is equal to that of the first laser beam incident on a first photodetector. A position calculator calculates displacement of the object relative to the laser light source on the basis of the difference between an output of the first photodetector and an output of the second photodetector.
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