Disk stacking method and apparatus
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United States of America Patent
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Oct 15, 2013
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Sep 30, 2011
filing date -
Sep 30, 2011
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Abstract
Aspects of embodiments of the present invention are directed toward a method of stacking disk-shaped substrates for polishing without using a centering shaft and an apparatus for implementing the method. A stack of disk-shaped substrates can be concentrically aligned without contacting the inside circumferential surfaces of the disk-shaped substrates by applying pressure to the outside edges of the disk-shaped substrates in different lateral directions.
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