Material property measurements using multiple frequency atomic fore microscopy
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United States of America Patent
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Oct 15, 2013
Grant Date -
Mar 29, 2012
app pub date -
Sep 23, 2011
filing date -
Oct 5, 2006
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.
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International Classification(s)
- 2011 Application Filing Year
- G01Q Class
- 74 Applications Filed
- 56 Patents Issued To-Date
- 75.68 % Issued To-Date
Cited Art Landscape
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- 1 Citation Count
- G01Q Class
- 0 % this patent is cited more than
- 12 Age
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| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Apr 15, 2025 |
