Defect inspection device using catadioptric objective lens
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United States of America Patent
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Oct 8, 2013
Grant Date -
Nov 8, 2012
app pub date -
Dec 19, 2008
filing date -
Mar 24, 2008
priority date (Note) -
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Abstract
A defect inspection device comprises an inspection optical system including a light source, a half mirror for reflecting illumination light emitted from the light source, a catadioptric objective lens for collecting reflected light from the sample by illumination light reflected by the half mirror, an imaging lens for focusing the reflected light transmitted through the catadioptric objective lens, a relay lens having a blocking member provided at a position at which specularly reflected light from the sample is focused by the imaging lens, and a detector for detecting specularly reflected light not blocked by the blocking member; and a computation processing unit for detecting defects of the sample on the basis of the signals detected by the detector.
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