Forming chalcogenide semiconductor absorbers
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United States of America Patent
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Oct 1, 2013
Grant Date -
Oct 27, 2011
app pub date -
Apr 22, 2010
filing date -
Apr 22, 2010
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Abstract
Sulfur-containing chalcogenide absorbers in thin film solar cell are manufactured by sequential sputtering or co-sputtering targets, one of which contains a sulfur compound, onto a substrate and then annealing the substrate. The anneal is performed in a non-sulfur containing environment and avoids the use of hazardous hydrogen sulfide gas. A sulfurized chalcogenide is formed having a sulfur concentration gradient.
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