Electron microscope
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United States of America Patent
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Sep 24, 2013
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N/A
app pub date -
May 9, 2012
filing date -
May 9, 2012
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Abstract
An electron microscope is offered which can correct chromatic and spherical aberrations without producing residual aberrations. In this microscope, a chromatic aberration-correcting optical system and a spherical aberration-correcting optical system are connected in series (in tandem) via a connection system. That is, the chromatic aberration-correcting optical system and the spherical aberration-correcting optical system are configured independently. Chromatic and spherical aberrations are corrected separately.
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