Surface analyzer of object to be measured and analyzing method
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United States of America Patent
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Sep 24, 2013
Grant Date -
Mar 15, 2012
app pub date -
Apr 7, 2009
filing date -
Apr 9, 2008
priority date (Note) -
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Abstract
A surface analyzer 1 includes: a sample stage 6 for placing a sample 5; a source for generating multicharged ions 3 for irradiating a beam 4 of multicharged ions having a valence of 15 or higher to the sample 5 placed on the sample stage 6; a mass analyzer 8 for detecting secondary ions 7 generated as a result of irradiating the beam of multicharged ions 4 to the sample 5; a secondary electron detector 10 for detecting secondary electrons 9 generated as a result of irradiating the beam of multicharged ions 4 to the sample 5; and a controller of mass analyzer 12 for generating analysis start signals in response to the secondary electron signals received, and transmitting the start signals to the mass analyzer. The surface analyzer 1 enables high-quality analysis of the surface of the sample in short time by using the multicharged ions.
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